Advanced Control of Piezoelectric Micro-/Nano-Positioning by Qingsong Xu, Kok Kiong Tan

By Qingsong Xu, Kok Kiong Tan

This e-book explores rising tools and algorithms that let designated keep an eye on of micro-/nano-positioning platforms. The textual content describes 3 regulate recommendations: hysteresis-model-based feedforward keep an eye on and hysteresis-model-free suggestions keep an eye on in accordance with and unfastened from country commentary. every one paradigm gets committed consciousness inside a selected a part of the text.

Readers are proven find out how to layout, validate and follow a number of new regulate ways in micromanipulation: hysteresis modelling, discrete-time sliding-mode keep watch over and model-reference adaptive regulate. Experimental effects are supplied all through and building up to a close remedy of useful functions within the fourth a part of the e-book. The functions specialise in regulate of piezoelectric grippers.

Advanced keep watch over of Piezoelectric Micro-/Nano-Positioning Systems will help educational researchers and training keep watch over and mechatronics engineers attracted to suppressing resources of nonlinearity comparable to hysteresis and waft while combining place and strength regulate of precision structures with piezoelectric actuation.

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2 System Description and Hysteresis Characterization Input voltage (V) (a) 27 8 6 4 2 0 0 2 4 6 8 10 6 8 10 Time (s) Displacement (µm) (b) 100 80 60 40 20 0 0 2 4 Time (s) Displacement (µm) (c) 100 80 1−10 Hz 60 40 20 0 0 1 2 3 4 5 Input voltage (V) 6 7 8 Fig. 3 Hysteresis curves of the XY nanopositioning stage with sinusoidal-wave inputs. a Input voltage to the voltage amplifier. b Time history of the displacement x. 3 Hysteresis Modeling The purpose of hysteresis modeling is to capture the hysteresis behavior of the system.

ASME 132(4), 041011 (2010) 20 1 Introduction 72. : Micro-/nanopositioning using model predictive output integral discrete sliding mode control. IEEE Trans. Ind. Electron. 59(2), 1161–1170 (2012) 73. : Model predictive discrete-time sliding mode control of a nanopositioning piezostage without modeling hysteresis. IEEE Trans. Control Syst. Technol. 20(4), 983–994 (2012) 74. : Hysteresis modeling and compensation of a piezostage using least squares support vector machines. Mechatronics 21(7), 1239–1251 (2011) 75.

Robot. 26(6), 965–977 (2010) 52. : Force control: A bird’s eye view. In: Siciliano, B. ) Control Problems in Robotics and Automation: Future Directions, pp. 1–17 (1998) 53. : Modeling and impedance control of a piezoelectric bimorph microgripper. In: Proceeding of IEEE/RSJ International Conference on Intelligent Robots and Systems, vol. 2, pp. 958–965. Raleigh, USA (1992) 54. : Force tracking in impedance control. Int. J. Robot. Res. 16(1), 97–117 (1997) 55. : Robust discrete adaptive input-output-based sliding mode controller.

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